ABDUMUTALIBOVICH, N. K. . Study of the Technology of Obtaining Thin Films in the Field of Microelectronics. International Journal of Development and Public Policy, [S. l.], v. 1, n. 4, p. 51–53, 2021. Disponível em: https://openaccessjournals.eu/index.php/ijdpp/article/view/206. Acesso em: 14 may. 2024.